Invention Grant
- Patent Title: Vacuum pumping arrangement
- Patent Title (中): 真空泵排列
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Application No.: US12083591Application Date: 2006-10-06
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Publication No.: US09127682B2Publication Date: 2015-09-08
- Inventor: Nigel Paul Schofield
- Applicant: Nigel Paul Schofield
- Applicant Address: GB Crawley, West Sussex
- Assignee: Edwards Limited
- Current Assignee: Edwards Limited
- Current Assignee Address: GB Crawley, West Sussex
- Agency: Westman, Champlin & Koehler, P.A.
- Priority: GB0520750.1 20051012
- International Application: PCT/GB2006/050320 WO 20061006
- International Announcement: WO2007/042842 WO 20070419
- Main IPC: F04D19/04
- IPC: F04D19/04 ; B23P11/00 ; F04D29/60 ; F04D27/02

Abstract:
A vacuum pumping arrangement for evacuating an enclosure is provided. The arrangement comprises a turbomolecular vacuum pump having an inlet which is connectable using fixing members to an outlet of an enclosure to be evacuated. Each of the fixing members passes through a first aperture in the inlet and through a second aperture in the outlet. An elongate, circumferentially extending cavity is provided extending from or adjacent to one of these apertures to accommodate a crushable insert. Energy transmitted to the fixing members by the turbomolecular vacuum pump during a failure thereof is thus absorbed by the deformation of the inserts. By absorbing a proportion of the energy in this way separation of the inlet from the outlet is thus inhibited.
Public/Granted literature
- US20090211653A1 Vacuum Pumping Arrangement Public/Granted day:2009-08-27
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