Invention Grant
- Patent Title: Interferometer
- Patent Title (中): 干涉仪
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Application No.: US14301898Application Date: 2014-06-11
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Publication No.: US09127924B2Publication Date: 2015-09-08
- Inventor: Markus Meissner , Ralph Joerger , Jörg Drescher , Wolfgang Holzapfel
- Applicant: DR. JOHANNES HEIDENHAIN GMBH
- Applicant Address: DE Traunreut
- Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee Address: DE Traunreut
- Agency: Kenyon & Kenyon LLP
- Priority: DE102013211758 20130621
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
An interferometer includes a light source, beam splitter, measuring reflector, reference retroreflector, detector system, and two transparent plane plates. The beam splitter splits a first beam of rays, emitted by the light source, into at least one measuring beam and at least one reference beam, defining a first splitting plane. The measuring beam propagates in a measuring arm and the reference beam propagates in a reference arm until being recombined at a recombining location, which is oriented parallel to the first splitting plane. The measuring reflector is disposed in the measuring arm, and the reference retroreflector is disposed in the reference arm. The first and second transparent plane plates are disposed parallel to each other in the beam path between the light source and the detector system. The reference retroreflector is formed in the first plane plate and the beam splitter is disposed on the second plane plate.
Public/Granted literature
- US20140376002A1 Interferometer Public/Granted day:2014-12-25
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