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US09127938B2 High-resolution surface measurement systems and methods 有权
高分辨率表面测量系统和方法

High-resolution surface measurement systems and methods
Abstract:
This disclosure provides systems, devices, and methods for capturing and measuring surface topography. This disclosure provides a high resolution retrographic sensor comprising a volume of elastomer and a thin, opaque reflective membrane. The reflective membrane is arranged to conform to a specimen that contacts it. The disclosure provides a high resolution visualization system comprising the retrographic sensor and an illumination source. Also provided are high resolution measurement systems comprising the retrographic sensor, an illumination source, an imaging device, and a processing component.
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