Invention Grant
- Patent Title: Manufacturable sub-3 nanometer palladium gap devices for fixed electrode tunneling recognition
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Application No.: US13945295Application Date: 2013-07-18
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Publication No.: US09128078B2Publication Date: 2015-09-08
- Inventor: Yann Astier , Jingwei Bai , Michael A. Guillorn , Satyavolu S. Papa Rao , Joshua T. Smith
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/41
- IPC: H01L29/41 ; G01N33/487

Abstract:
A technique is provided for manufacturing a nanogap in a nanodevice. An oxide is disposed on a wafer. A nanowire is disposed on the oxide. A helium ion beam is applied to cut the nanowire into a first nanowire part and a second nanowire part which forms the nanogap in the nanodevice. Applying the helium ion beam to cut the nanogap forms a signature of nanowire material in proximity to at least one opening of the nanogap.
Public/Granted literature
- US20140377900A1 MANUFACTURABLE SUB-3 NANOMETER PALLADIUM GAP DEVICES FOR FIXED ELECTRODE TUNNELING RECOGNITION Public/Granted day:2014-12-25
Information query
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