Invention Grant
- Patent Title: Laser-enhanced chemical etching of nanotips
- Patent Title (中): 激光增强化学蚀刻纳米尖端
-
Application No.: US14097211Application Date: 2013-12-04
-
Publication No.: US09128117B2Publication Date: 2015-09-08
- Inventor: ZhiHong Mai , Jeffrey C. Lam , Mohammed Khalid Bin Dawood , Tsu Hau Ng
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Horizon IP Pte. Ltd.
- Main IPC: H01L21/302
- IPC: H01L21/302 ; G01Q70/16 ; B82Y35/00 ; C25F3/08

Abstract:
A method for sharpening a nanotip involving a laser-enhanced chemical etching is provided. The method includes immersing a nanotip in an etchant solution. The nanotip includes a base and an apex, the apex having a diameter smaller than a diameter of the base. The method also includes irradiating the nanotip with laser fluence to establish a temperature gradient in the nanotip along a direction from the apex to the base of the nanotip such that the apex and base are etched at different rates.
Public/Granted literature
- US20140242805A1 LASER-ENHANCED CHEMICAL ETCHING OF NANOTIPS Public/Granted day:2014-08-28
Information query
IPC分类: