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US09128117B2 Laser-enhanced chemical etching of nanotips 有权
激光增强化学蚀刻纳米尖端

Laser-enhanced chemical etching of nanotips
Abstract:
A method for sharpening a nanotip involving a laser-enhanced chemical etching is provided. The method includes immersing a nanotip in an etchant solution. The nanotip includes a base and an apex, the apex having a diameter smaller than a diameter of the base. The method also includes irradiating the nanotip with laser fluence to establish a temperature gradient in the nanotip along a direction from the apex to the base of the nanotip such that the apex and base are etched at different rates.
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