Invention Grant
- Patent Title: Adaptive photomasks and methods for using the same
- Patent Title (中): 自适应光掩模及其使用方法
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Application No.: US13970534Application Date: 2013-08-19
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Publication No.: US09128385B2Publication Date: 2015-09-08
- Inventor: Napthaneal Yuen Tan
- Applicant: Apple Inc.
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Agency: Downey Brand LLP
- Main IPC: G03F1/50
- IPC: G03F1/50 ; G03F7/20 ; G03F1/36 ; G03F1/22

Abstract:
The embodiments described herein relate to methods, devices, and systems for masking a substrate using a photomasking process. An adaptive photomask configured to generate a photomasking pattern in accordance with dimensions of a surface feature on substrate is described. The adaptive photomask can be used to create customized photomask patterns for individual substrates. Methods and devices described herein can be used in manufacturing processes where similar parts having slight differences due to built-in tolerances are manufactured. Methods and a devices described herein can also be used in manufacture processes involving masking of three-dimensional portions of a part. A photomasking system that includes a translational mechanism for scanning a substrate surface is described.
Public/Granted literature
- US20150049324A1 ADAPTIVE PHOTOMASKS AND METHODS FOR USING THE SAME Public/Granted day:2015-02-19
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