Invention Grant
- Patent Title: Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus
- Patent Title (中): 包括波前校正部分和光束方向部分的光学装置，包括光学装置的激光装置和包括激光装置的极紫外光发生系统
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Application No.: US13637942Application Date: 2011-11-23
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Publication No.: US09128391B2Publication Date: 2015-09-08
- Inventor: Masato Moriya , Osamu Wakabayashi
- Applicant: Masato Moriya , Osamu Wakabayashi
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: McDermott Will & Emery LLP
- Priority: JP2010-265787 20101129; JP2011-176874 20110812
- International Application: PCT/IB2011/002795 WO 20111123
- International Announcement: WO2012/073087 WO 20120607
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H05G2/00 ; H01S3/00 ; H01S3/225 ; H01S3/23
Abstract:
An optical device may include a mirror for respectively reflecting and transmitting parts of a first laser beam as first reflected and first transmitted beams, and for respectively transmitting and reflecting parts of a second laser beam as second transmitted and second reflected beams; an optical system disposed so that the first and second laser beams are such that beam paths of the first transmitted and second reflected beams are parallel or substantially coincide, or such that beam paths of the first reflected and second transmitted beams are parallel or substantially coincide; first and second measuring units configured to respectively measure a beam parameter of the first transmitted or first reflected beams, and of the second reflected or second transmitted beams; and first and second adjusting units configured to adjust the first and second laser beams based on measurement results by the measuring units.
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