Invention Grant
- Patent Title: Method and apparatus for manufacturing magnetic recording medium
- Patent Title (中): 制造磁记录介质的方法和装置
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Application No.: US12668390Application Date: 2008-07-03
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Publication No.: US09129636B2Publication Date: 2015-09-08
- Inventor: Gohei Kurokawa
- Applicant: Gohei Kurokawa
- Applicant Address: JP Tokyo
- Assignee: SHOWA DENKO K.K.
- Current Assignee: SHOWA DENKO K.K.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JPP2007-182528 20070711
- International Application: PCT/JP2008/062058 WO 20080703
- International Announcement: WO2009/008324 WO 20090115
- Main IPC: G11B5/84
- IPC: G11B5/84 ; C23C14/56 ; G11B5/82
Abstract:
The present invention provides a method for manufacturing a magnetic recording medium by mounting a substrate for film formation on a carrier, sequentially transporting said substrate into a plurality of connected chambers, and forming at least a magnetic film and a carbon protective film on said substrate for film formation within said chambers, wherein said method comprises a step of conducting ashing to remove an accumulated carbon protective film adhered to a carrier surface, which is performed following a step of removing a magnetic recording medium from said carrier following film formation, but prior to a step of mounting a substrate for film formation on said carrier.
Public/Granted literature
- US20100227050A1 METHOD AND APPARATUS FOR MANUFACTURING MAGNETIC RECORDING MEDIUM Public/Granted day:2010-09-09
Information query
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