Invention Grant
- Patent Title: Thin film transistor
- Patent Title (中): 薄膜晶体管
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Application No.: US13733046Application Date: 2013-01-02
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Publication No.: US09129681B2Publication Date: 2015-09-08
- Inventor: Peter Rabkin , Masaaki Higashitani
- Applicant: SanDisk Technologies Inc.
- Applicant Address: US TX Plano
- Assignee: SanDisk Technologies Inc.
- Current Assignee: SanDisk Technologies Inc.
- Current Assignee Address: US TX Plano
- Agency: Vierra Magen Marcus LLP
- Main IPC: G11C16/08
- IPC: G11C16/08 ; H01L29/66 ; H01L29/786 ; G11C16/04 ; G11C16/06 ; H01L21/04 ; H01L21/265 ; H01L29/423 ; H01L27/115 ; H01L29/792 ; H01L29/78

Abstract:
Disclosed herein are thin film transistors (TFTs) and techniques for fabricating TFTs. A major plane of the gate electrode of the TFT may be vertically oriented with respect to a horizontal layer of polysilicon in which the TFT resides. An interface between the gate electrode and gate dielectric may be vertically oriented with respect to a horizontal layer of polysilicon in which the TFT resides. The TFT may have a channel width that is defined by a thickness of the horizontal layer of polysilicon. The TFT may be formed by etching a hole in a layer of polysilicon. Then, a gate electrode and gate dielectric may be formed in the hole by depositing layers of dielectric and conductor material on the sidewall. The body may be formed in the horizontal layer of polysilicon outside the hole.
Public/Granted literature
- US20130270568A1 THIN FILM TRANSISTOR Public/Granted day:2013-10-17
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