Invention Grant
- Patent Title: Method and system for providing magnetic junctions having improved characteristics
- Patent Title (中): 提供具有改进特性的磁结的方法和系统
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Application No.: US13553965Application Date: 2012-07-20
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Publication No.: US09129690B2Publication Date: 2015-09-08
- Inventor: Chang-Man Park , Dustin William Erickson , Mohamad Towfik Krounbi
- Applicant: Chang-Man Park , Dustin William Erickson , Mohamad Towfik Krounbi
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Convergent Law Group LLP
- Main IPC: G11C11/00
- IPC: G11C11/00 ; G11C11/16 ; H01L43/08 ; H01L43/12

Abstract:
A method and apparatus provide a magnetic memory including magnetic junctions on a substrate. The apparatus include an RIE chamber and an ion milling chamber. The chambers are coupled such that the magnetic memory is movable between the chambers without exposing the magnetic memory to ambient. The method provides magnetic junction layers and a hard mask layer on the magnetic junction layers. A hard mask is formed from the hard mask layer using an RIE. The magnetic junction layers are ion milled after the RIE and without exposing the magnetic memory to an ambient after the RIE. The ion milling defines at least part of each magnetic junction. A magnetic junction may be provided. The magnetic junction includes pinned, nonmagnetic spacer, and free layers. The free layer has a width of not more than twenty nanometers and is switchable when a write current is passed through the magnetic junction.
Public/Granted literature
- US20140022839A1 METHOD AND SYSTEM FOR PROVIDING MAGNETIC JUNCTIONS HAVING IMPROVED CHARACTERISTICS Public/Granted day:2014-01-23
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