Invention Grant
- Patent Title: Transmission electron microscope, and method of observing specimen
- Patent Title (中): 透射电子显微镜,观察样品的方法
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Application No.: US14289092Application Date: 2014-05-28
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Publication No.: US09129772B2Publication Date: 2015-09-08
- Inventor: Eiko Nakazawa , Hiroyuki Kobayashi , Susumu Kuwabata
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2008-117547 20080428
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G21K5/08 ; H01J37/20 ; G01N23/225 ; H01J37/26 ; G01N23/04 ; G01N1/28 ; G01N1/40 ; H01J37/30

Abstract:
Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid. Note that the specimen-holding member is designed to be rotatable.
Public/Granted literature
- US20140264017A1 Transmission Electron Microscope, and Method of Observing Specimen Public/Granted day:2014-09-18
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