Invention Grant
- Patent Title: Fluid distribution members and/or assemblies
- Patent Title (中): 流体分配构件和/或组件
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Application No.: US13051713Application Date: 2011-03-18
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Publication No.: US09129778B2Publication Date: 2015-09-08
- Inventor: Armin Huseinovic , Ivan L. Berry
- Applicant: Armin Huseinovic , Ivan L. Berry
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/452 ; C23C16/455
Abstract:
A fluid distribution member assembly for use in a substrate processing system includes a fluid distribution member having a central portion and a perimeter portion. The fluid distribution member defines at least one slot formed there-through and the at least one slot extends along a non-radial path configured to allow the central portion to expand and rotate with respect to the perimeter portion.
Public/Granted literature
- US20120237696A1 FLUID DISTRIBUTION MEMBERS AND/OR ASSEMBLIES Public/Granted day:2012-09-20
Information query
