Invention Grant
US09129795B2 Process for plasma treatment employing ceramic-filled polyamideimide composite parts
有权
使用陶瓷填充的聚酰胺酰亚胺复合材料部件进行等离子体处理
- Patent Title: Process for plasma treatment employing ceramic-filled polyamideimide composite parts
- Patent Title (中): 使用陶瓷填充的聚酰胺酰亚胺复合材料部件进行等离子体处理
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Application No.: US13083730Application Date: 2011-04-11
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Publication No.: US09129795B2Publication Date: 2015-09-08
- Inventor: Scott Howard Williams , Richard William Campbell , Stephan Glander
- Applicant: Scott Howard Williams , Richard William Campbell , Stephan Glander
- Applicant Address: CH Lenzburg
- Assignee: QUADRANT EPP AG
- Current Assignee: QUADRANT EPP AG
- Current Assignee Address: CH Lenzburg
- Agency: Brooks Kushman P.C.
- Main IPC: C23F1/00
- IPC: C23F1/00 ; H01L21/306 ; H01L21/02 ; H01J37/32 ; C08G73/14 ; C08L79/08 ; C08L71/00 ; C08L81/02 ; C08L81/06
Abstract:
Internal components of plasma reactors are composed of a toleratable, ceramic filled plasma-useful polymer such as a high temperature engineering thermoplastic, preferably a polyamideimide. The parts exhibit a low erosion rate upon exposure to plasma at low pressure.
Public/Granted literature
- US20120255854A1 Process For Plasma Treatment Employing Ceramic-Filled Polyamideimide Composite Parts Public/Granted day:2012-10-11
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