Invention Grant
- Patent Title: Three-dimensional semiconductor memory devices having double cross point array and methods of fabricating the same
- Patent Title (中): 具有双交叉点阵列的三维半导体存储器件及其制造方法
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Application No.: US13494236Application Date: 2012-06-12
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Publication No.: US09129830B2Publication Date: 2015-09-08
- Inventor: Ingyu Baek , Sunjung Kim
- Applicant: Ingyu Baek , Sunjung Kim
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG Electronics Co., Ltd.
- Current Assignee: SAMSUNG Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Ellsworth IP Group PLLC
- Priority: KR10-2011-0056994 20110613
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L27/10 ; H01L27/22 ; H01L27/24 ; G11C13/00 ; H01L45/00

Abstract:
Three-dimensional semiconductor memory devices and methods of fabricating the same. The device may include first, second and third conductive lines disposed at different vertical levels to define two intersections, and two memory cells disposed at the two intersections, respectively. The first and second conductive lines may extend parallel to each other, and the third conductive line may extend to cross the first and second conductive lines. The first and second conductive lines can be alternatingly arranged along the length of third conductive line in vertical sectional view, and the third conductive line may be spaced vertically apart from the first and second conductive lines.
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