Invention Grant
US09129871B2 Radioactive-ray imaging apparatus, radioactive-ray imaging display system and transistor 有权
放射线成像装置,放射线成像显示系统和晶体管

Radioactive-ray imaging apparatus, radioactive-ray imaging display system and transistor
Abstract:
Disclosed herein is a transistor including: a semiconductor layer; a first gate insulation film and a first interlayer insulation film which are provided on a specific surface side of the semiconductor layer; a first gate electrode provided at a location between the first gate insulation film and the first interlayer insulation film; an insulation film provided on the other surface side of the semiconductor layer; source and drain electrodes provided by being electrically connected to the semiconductor layer; and a shield electrode layer provided in such a way that at least portions of the shield electrode layer face edges of the first gate electrode, wherein at least one of the first gate insulation film, the first interlayer insulation film and the insulation film include a silicon-oxide film.
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