Invention Grant
- Patent Title: Polishing method of non-oxide single-crystal substrate
- Patent Title (中): 非氧化物单晶衬底抛光方法
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Application No.: US14064397Application Date: 2013-10-28
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Publication No.: US09129901B2Publication Date: 2015-09-08
- Inventor: Iori Yoshida , Satoshi Takemiya , Hiroyuki Tomonaga
- Applicant: ASAHI GLASS COMPANY, LIMITED
- Applicant Address: JP Chiyoda-ku
- Assignee: ASAHI GLASS COMPANY, LIMITED
- Current Assignee: ASAHI GLASS COMPANY, LIMITED
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-097832 20110426
- Main IPC: H01L21/306
- IPC: H01L21/306 ; H01L21/02 ; C09G1/04 ; H01L29/16

Abstract:
There is provided a polishing method for polishing a non-oxide single-crystal substrate such as a silicon carbide single-crystal substrate at a high polishing rate to obtain a high-quality surface that is smooth and excellent in surface properties. This polishing method is a method of supplying a polishing liquid to a polishing pad not including abrasive grains to bring a surface to be polished of the non-oxide single-crystal substrate and the polishing pad into contact with each other and polishing the surface to be polished by a relative movement between them, the method characterized in that the polishing liquid comprises: an oxidant whose redox potential is 0.5 V or more and which contains a transition metal; and water, and does not contain abrasive grains.
Public/Granted literature
- US20140057438A1 POLISHING METHOD OF NON-OXIDE SINGLE-CRYSTAL SUBSTRATE Public/Granted day:2014-02-27
Information query
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