Invention Grant
- Patent Title: Method of forming a metal bump
- Patent Title (中): 形成金属凸块的方法
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Application No.: US14461703Application Date: 2014-08-18
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Publication No.: US09129957B1Publication Date: 2015-09-08
- Inventor: Ching-Yuan Ho , Chang-Chun Lee
- Applicant: Chung Yuan Christian University
- Applicant Address: TW Chung Li
- Assignee: CHUNG YUAN CHRISTIAN UNIVERSITY
- Current Assignee: CHUNG YUAN CHRISTIAN UNIVERSITY
- Current Assignee Address: TW Chung Li
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW103116316A 20140507
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L23/498 ; H01L23/00

Abstract:
A method for forming a metal bump is provided. Firstly, a photo-resist layer is formed on an IC chip by using a lithographic process. The photo-resist layer comprises a metal bump reserved groove and a metal bump slit reserved portion with the extent covering a metal pad. The metal bump slit reserved portion is formed on the metal pad and within the metal bump reserved groove. Then, a deposition process is applied to form the metal bump in the metal bump reserved groove and have the metal bump slit reserved portion penetrating the metal bump. Afterward, the photo-resist layer is removed to leave the metal bump with a metal bump slit therein.
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