Invention Grant
- Patent Title: Programmable electrical fuse
- Patent Title (中): 可编程电气保险丝
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Application No.: US13871042Application Date: 2013-04-26
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Publication No.: US09129964B2Publication Date: 2015-09-08
- Inventor: Jason Coyner , Baozhen Li , Keith Kwong Hon Wong , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent L. Jeffrey Kelly; Catherine Ivers
- Main IPC: H01L23/525
- IPC: H01L23/525 ; H01L21/768 ; H01L23/532

Abstract:
A method of forming an electronic fuse including forming a first metal line and a second metal line in a first interconnect level, the first metal line is electrically insulated from the second metal line, forming a single via in a second interconnect level above the first interconnect level, the via is made from the same material as either the first metal line or the second metal line, and the via is in direct contact with both the first metal line and the second metal line, a contact area between the via and the first metal line or the second metal line ranges from about 5% to about 25% of a total cross-sectional area of the via, the via has a height to width ratio greater than 1, and forming a third metal line in the second interconnect level in direct contact with the via.
Public/Granted literature
- US20140319650A1 PROGRAMMABLE ELECTRICAL FUSE Public/Granted day:2014-10-30
Information query
IPC分类: