Invention Grant
US09129984B2 Three dimensional semiconductor device having lateral channel and method of manufacturing the same 有权
具有横向通道的三维半导体器件及其制造方法

  • Patent Title: Three dimensional semiconductor device having lateral channel and method of manufacturing the same
  • Patent Title (中): 具有横向通道的三维半导体器件及其制造方法
  • Application No.: US14074452
    Application Date: 2013-11-07
  • Publication No.: US09129984B2
    Publication Date: 2015-09-08
  • Inventor: Suk Ki Kim
  • Applicant: SK hynix Inc.
  • Applicant Address: KR Gyeonggi-do
  • Assignee: SK Hynix Inc.
  • Current Assignee: SK Hynix Inc.
  • Current Assignee Address: KR Gyeonggi-do
  • Agency: IP & T Group LLP
  • Priority: KR10-2013-0088910 20130726
  • Main IPC: H01L29/66
  • IPC: H01L29/66 H01L45/00 H01L27/22 H01L27/24
Three dimensional semiconductor device having lateral channel and method of manufacturing the same
Abstract:
A 3D semiconductor device and a method of manufacturing the same are provided. The 3D semiconductor device includes a semiconductor substrate, an insulating layer formed on the semiconductor substrate, an active line including a source region and a drain region formed on the insulating layer, a gate electrode located on a portion of the active line, corresponding to a region between the source region and the drain region, and extending to a direction substantially perpendicular to the active line, and a line-shaped common source node formed to be electrically coupled to the source region and extending substantially in parallel to the gate electrode in a space between gate electrodes.
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