Invention Grant
- Patent Title: Three dimensional semiconductor device having lateral channel and method of manufacturing the same
- Patent Title (中): 具有横向通道的三维半导体器件及其制造方法
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Application No.: US14074452Application Date: 2013-11-07
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Publication No.: US09129984B2Publication Date: 2015-09-08
- Inventor: Suk Ki Kim
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2013-0088910 20130726
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L45/00 ; H01L27/22 ; H01L27/24

Abstract:
A 3D semiconductor device and a method of manufacturing the same are provided. The 3D semiconductor device includes a semiconductor substrate, an insulating layer formed on the semiconductor substrate, an active line including a source region and a drain region formed on the insulating layer, a gate electrode located on a portion of the active line, corresponding to a region between the source region and the drain region, and extending to a direction substantially perpendicular to the active line, and a line-shaped common source node formed to be electrically coupled to the source region and extending substantially in parallel to the gate electrode in a space between gate electrodes.
Public/Granted literature
- US20150028425A1 THREE DIMENSIONAL SEMICONDUCTOR DEVICE HAVING LATERAL CHANNEL AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2015-01-29
Information query
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