Invention Grant
- Patent Title: Method for manufacturing transistor
- Patent Title (中): 晶体管制造方法
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Application No.: US13376834Application Date: 2011-06-13
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Publication No.: US09129992B2Publication Date: 2015-09-08
- Inventor: Shengdong Zhang , Xin He , Longyan Wang
- Applicant: Shengdong Zhang , Xin He , Longyan Wang
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: PEKING UNIVERSITY SHENZHEN GRADUATE SCHOOL
- Current Assignee: PEKING UNIVERSITY SHENZHEN GRADUATE SCHOOL
- Current Assignee Address: CN Shenzhen, Guangdong
- Agency: Perkins Coie LLP
- Priority: CN201010568303 20101201
- International Application: PCT/CN2011/075635 WO 20110613
- International Announcement: WO2012/071878 WO 20120607
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/66 ; H01L29/786

Abstract:
Designs and fabrication of dual-gate thin film transistors are provided. An active region and a top gate electrode of the transistor can be made of a transparent thin film material. A photoresist can be coated onto a surface of the transparent conductive thin film for forming the top gate electrode. Light is from the bottom of the substrate during exposure. After the development, a photoresist pattern aligned with the bottom gate electrode is formed on the surface of the conductive thin film. The top gate electrode aligned with the bottom gate electrode is formed by etching the conductive thin film. The bottom gate electrode can be used as a mask, which may save the cost for manufacturing the transistor and improve the accuracy of alignment between the top gate electrode and the bottom gate electrode and the performance of the dual-gate thin film transistor.
Public/Granted literature
- US20130309808A1 METHOD FOR MANUFACTURING TRANSISTOR Public/Granted day:2013-11-21
Information query
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