Invention Grant
- Patent Title: Nonvolatile memory device and method of fabricating the same
- Patent Title (中): 非易失性存储器件及其制造方法
-
Application No.: US13718388Application Date: 2012-12-18
-
Publication No.: US09130053B2Publication Date: 2015-09-08
- Inventor: Min-Soo Kim , Young-Jin Lee , Jin-Hae Choi , Joo-Hee Han , Sung-Jin Whang , Byung-Ho Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2012-0091116 20120821
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L29/66 ; H01L27/115

Abstract:
This technology relates to a nonvolatile memory device and a method of fabricating the same. The nonvolatile memory device may include a pipe connection gate electrode configured to have a bottom buried in a groove formed in a substrate, one or more pipe channel layers formed within the pipe connection gate electrode, pairs of main channel layers each coupled to the pipe channel layer and extended in a direction substantially perpendicular to the substrate, and a plurality of interlayer insulating layers and a plurality of cell gate electrodes alternately stacked along the main channel layers, wherein the pipe connection gate electrode includes a metal silicide layer formed within the groove. The electric resistance of the pipe connection gate electrode may be greatly reduced without an increase in a substantial height by forming the metal silicide layer buried in the substrate under the pipe connection gate electrode.
Public/Granted literature
- US20140054672A1 NONVOLATILE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2014-02-27
Information query
IPC分类: