Invention Grant
- Patent Title: Integrated circuit having a vertical power MOS transistor
- Patent Title (中): 具有垂直功率MOS晶体管的集成电路
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Application No.: US13588070Application Date: 2012-08-17
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Publication No.: US09130060B2Publication Date: 2015-09-08
- Inventor: Chun-Wai Ng , Hsueh-Liang Chou , Po-Chih Su , Ruey-Hsin Liu
- Applicant: Chun-Wai Ng , Hsueh-Liang Chou , Po-Chih Su , Ruey-Hsin Liu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238 ; H01L29/423 ; H01L29/78

Abstract:
An integrated circuit comprises a plurality of lateral devices and quasi vertical devices formed in a same semiconductor die. The quasi vertical devices include two trenches. A first trench is formed between a first drain/source region and a second drain/source region. The first trench comprises a dielectric layer formed in a bottom portion of the first trench and a gate region formed in an upper portion of the first trench. A second trench is formed on an opposite side of the second drain/source region from the first trench. The second trench is coupled between the second drain/source region and a buried layer, wherein the second trench is of a same depth as the first trench.
Public/Granted literature
- US20140015047A1 Integrated Circuit Having a Vertical Power MOS Transistor Public/Granted day:2014-01-16
Information query
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