Invention Grant
US09130069B2 Method for manufacturing nitride semiconductor layer and method for manufacturing semiconductor light emitting device 有权
制造氮化物半导体层的方法和半导体发光器件的制造方法

Method for manufacturing nitride semiconductor layer and method for manufacturing semiconductor light emitting device
Abstract:
According to one embodiment, a method is disclosed for manufacturing a nitride semiconductor layer. The method can include forming a first nitride semiconductor layer on a substrate in a reactor supplied with a first carrier gas and a first source gas. The first nitride semiconductor layer includes indium. The first carrier gas includes hydrogen supplied into the reactor at a first flow rate and includes nitrogen supplied into the reactor at a second flow rate. The first source gas includes indium and nitrogen and supplied into the reactor at a third flow rate. The first flow rate is not less than 0.07% and not more than 0.15% of a sum of the first flow rate, the second flow rate, and the third flow rate.
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