Invention Grant
- Patent Title: Method for manufacturing nitride semiconductor layer and method for manufacturing semiconductor light emitting device
- Patent Title (中): 制造氮化物半导体层的方法和半导体发光器件的制造方法
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Application No.: US13798436Application Date: 2013-03-13
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Publication No.: US09130069B2Publication Date: 2015-09-08
- Inventor: Hajime Nago , Yoshiyuki Harada , Hisashi Yoshida , Shigeya Kimura , Shinya Nunoue
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-179532 20120813
- Main IPC: H01L21/04
- IPC: H01L21/04 ; H01L33/00 ; H01L21/02 ; H01L33/06 ; C23C16/30 ; C23C16/455

Abstract:
According to one embodiment, a method is disclosed for manufacturing a nitride semiconductor layer. The method can include forming a first nitride semiconductor layer on a substrate in a reactor supplied with a first carrier gas and a first source gas. The first nitride semiconductor layer includes indium. The first carrier gas includes hydrogen supplied into the reactor at a first flow rate and includes nitrogen supplied into the reactor at a second flow rate. The first source gas includes indium and nitrogen and supplied into the reactor at a third flow rate. The first flow rate is not less than 0.07% and not more than 0.15% of a sum of the first flow rate, the second flow rate, and the third flow rate.
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