Invention Grant
US09130081B2 Bolometer having absorber with pillar structure for thermal shorting
有权
热分解器具有用于热短路的柱结构的吸收器
- Patent Title: Bolometer having absorber with pillar structure for thermal shorting
- Patent Title (中): 热分解器具有用于热短路的柱结构的吸收器
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Application No.: US14109936Application Date: 2013-12-17
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Publication No.: US09130081B2Publication Date: 2015-09-08
- Inventor: Gary Yama , Fabian Purkl , Ando Lars Feyh
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot Moore & Beck LLP
- Main IPC: G01J5/20
- IPC: G01J5/20 ; H01L31/0248 ; H01L31/18 ; G01J5/02 ; H01L31/09

Abstract:
A semiconductor device includes a substrate having an electrode structure. An absorber structure is suspended over the electrode structure and spaced a first distance apart from the first electrode structure. The absorber structure includes i) suspension structures extending upwardly from the substrate and being electrically connected to readout conductors, and ii) a pillar structure extending downwardly from the absorber structure toward the first electrode structure. The pillar structure has a contact portion located a second distance apart from the first electrode structure, the second distance being less than the first distance. The absorber structure is configured to flex toward the substrate under a test condition. The second distance is selected such that the contact portion of the pillar structure is positioned in contact with the first electrode structure when the absorber structure is flexed in response to the test condition.
Public/Granted literature
- US20140175285A1 BOLOMETER HAVING ABSORBER WITH PILLAR STRUCTURE FOR THERMAL SHORTING Public/Granted day:2014-06-26
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