Invention Grant
- Patent Title: Method of stripping hot melt etch resists from semiconductors
- Patent Title (中): 从半导体剥离热熔蚀刻抗蚀剂的方法
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Application No.: US13239358Application Date: 2011-09-21
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Publication No.: US09130110B2Publication Date: 2015-09-08
- Inventor: Hua Dong , Robert K. Barr
- Applicant: Hua Dong , Robert K. Barr
- Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee: Rohm and Haas Electronic Materials LLC
- Main IPC: C03C15/00
- IPC: C03C15/00 ; C09K13/00 ; H01L31/18 ; G03F7/42 ; H01L31/0224

Abstract:
Hot melt etch resist is selectively applied to an anti-reflective coating or a selective emitter on a semiconductor wafer. The exposed portions of the anti-reflective coating or selective emitter are etched away using an inorganic acid containing etch to expose the semiconductor surface. The hot melt etch resist is then stripped from the semiconductor with an alkaline stripper which does not compromise the electrical integrity of the semiconductor. The exposed semiconductor is then metalized to form current tracks.
Public/Granted literature
- US20120070992A1 METHOD OF STRIPPING HOT MELT ETCH RESISTS FROM SEMICONDUCTORS Public/Granted day:2012-03-22
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