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US09130110B2 Method of stripping hot melt etch resists from semiconductors 有权
从半导体剥离热熔蚀刻抗蚀剂的方法

Method of stripping hot melt etch resists from semiconductors
Abstract:
Hot melt etch resist is selectively applied to an anti-reflective coating or a selective emitter on a semiconductor wafer. The exposed portions of the anti-reflective coating or selective emitter are etched away using an inorganic acid containing etch to expose the semiconductor surface. The hot melt etch resist is then stripped from the semiconductor with an alkaline stripper which does not compromise the electrical integrity of the semiconductor. The exposed semiconductor is then metalized to form current tracks.
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