Invention Grant
- Patent Title: Actuator and optical scanning apparatus
- Patent Title (中): 执行器和光学扫描装置
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Application No.: US13625063Application Date: 2012-09-24
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Publication No.: US09130146B2Publication Date: 2015-09-08
- Inventor: Hisamichi Sekine , Hisanori Aga , Yuki Maruyama
- Applicant: Hisamichi Sekine , Hisanori Aga , Yuki Maruyama
- Applicant Address: JP Tokyo
- Assignee: MITSUMI ELECTRIC CO., LTD.
- Current Assignee: MITSUMI ELECTRIC CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JP2011-217124 20110930
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H01L41/047 ; H01L41/08

Abstract:
An actuator includes a drive beam; a lower electrode formed on the drive beam; a piezoelectric element provided on the lower electrode; an upper electrode provided on the piezoelectric element; an upper wiring connecting the upper electrode and a wiring for supplying a voltage to the upper electrode; and an insulating part providing electrical insulation between the upper electrode and the lower electrode and formed under the upper wiring such that it covers an end of the lower electrode. The insulating part includes insulating extension parts extended on opposite sides of the upper wiring in a width direction of the upper wiring.
Public/Granted literature
- US20130083382A1 ACTUATOR AND OPTICAL SCANNING APPARATUS Public/Granted day:2013-04-04
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