Invention Grant
US09130146B2 Actuator and optical scanning apparatus 有权
执行器和光学扫描装置

Actuator and optical scanning apparatus
Abstract:
An actuator includes a drive beam; a lower electrode formed on the drive beam; a piezoelectric element provided on the lower electrode; an upper electrode provided on the piezoelectric element; an upper wiring connecting the upper electrode and a wiring for supplying a voltage to the upper electrode; and an insulating part providing electrical insulation between the upper electrode and the lower electrode and formed under the upper wiring such that it covers an end of the lower electrode. The insulating part includes insulating extension parts extended on opposite sides of the upper wiring in a width direction of the upper wiring.
Public/Granted literature
Information query
Patent Agency Ranking
0/0