Invention Grant
US09130148B2 Piezoelectric resonator plate, piezoelectric resonator, method for manufacturing piezoelectric resonator plate, and method for manufacturing piezoelectric resonator 有权
压电谐振器板,压电谐振器,压电谐振器板的制造方法以及压电谐振器的制造方法

Piezoelectric resonator plate, piezoelectric resonator, method for manufacturing piezoelectric resonator plate, and method for manufacturing piezoelectric resonator
Abstract:
A piezoelectric resonator plate includes at least a pair of excitation electrodes and at least a pair of extraction electrodes. The pair of extraction electrodes are respectively extracted from the pair of excitation electrodes to electrically and mechanically bond the pair of excitation electrodes to an external electrode. The pair of extraction electrodes each include a distal end portion. The distal end portion includes a connecting electrode extracted to a vicinity of one end portion on one principal surface of the piezoelectric resonator plate. The connecting electrodes each include a top surface where a first metal film to be bonded to the external electrode is formed. The first metal film includes a top surface with two or more protruding portions. The first metal film has a larger surface roughness and a smaller area compared with the respective connecting electrodes. The protruding portions are formed with cross-sections in curvature shapes.
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