Invention Grant
- Patent Title: Method of manufacturing a nonvolatile memory device having a variable resistance element whose resistance value changes reversibly upon application of an electric pulse
- Patent Title (中): 具有可变电阻元件的非易失性存储器件的制造方法,其电阻值在施加电脉冲时可逆地变化
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Application No.: US14122151Application Date: 2013-03-27
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Publication No.: US09130167B2Publication Date: 2015-09-08
- Inventor: Hideaki Murase , Yoshio Kawashima , Atsushi Himeno , Takumi Mikawa
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2012-077948 20120329
- International Application: PCT/JP2013/002098 WO 20130327
- International Announcement: WO2013/145741 WO 20131003
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L45/00 ; H01L27/24

Abstract:
A method of manufacturing a nonvolatile memory device includes: forming a first electrode; forming, above the first electrode, a metal oxide material layer including a first metal oxide; forming a mask above part of the metal oxide material layer main surface; forming, in a region of the metal oxide material layer not covered by the mask, a high oxygen concentration region including a second metal oxide having a lower degree of oxygen deficiency than the first metal oxide; removing the mask; forming, above a first variable resistance layer including the high oxygen concentration region and a low oxygen concentration region that is a region of the metal oxide material layer other than the high oxygen concentration region, a second variable resistance layer including a third metal oxide having a lower degree of oxygen deficiency than the first metal oxide; and forming a second electrode above the second variable resistance layer.
Public/Granted literature
- US20140110659A1 NONVOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2014-04-24
Information query
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