Invention Grant
US09130345B2 System and method for generating extreme ultraviolet light, and laser apparatus
有权
用于产生极紫外光的系统和方法，以及激光装置
- Patent Title: System and method for generating extreme ultraviolet light, and laser apparatus
- Patent Title (中): 用于产生极紫外光的系统和方法，以及激光装置
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Application No.: US14152813Application Date: 2014-01-10
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Publication No.: US09130345B2Publication Date: 2015-09-08
- Inventor: Tatsuya Yanagida , Osamu Wakabayashi
- Applicant: GIGAPHOTON, INC.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: McDermott Will & Emery LLP
- Priority: JP2010-076268 20100329; JP2010-254251 20101112
- Main IPC: H05G2/00
- IPC: H05G2/00 ; H01S3/10
Abstract:
An extreme ultraviolet light generation system used with a laser apparatus may be provided, and the extreme ultraviolet light generation system may include: a chamber including at least one window for at least one laser beam and a target supply unit for supplying a target material into the chamber; and at least one polarization control unit, provided on a laser beam path, for controlling a polarization state of the at least one laser beam.
Public/Granted literature
- US20140124685A1 SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT, AND LASER APPARATUS Public/Granted day:2014-05-08
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