Invention Grant
US09130536B2 Radio frequency signal splitter and matcher 有权
射频信号分离器和匹配器

Radio frequency signal splitter and matcher
Abstract:
This application relates to systems and methods for splitting a current signal into at least two signals that are out of phase with each other. The power splitter may include a conductive element that may generate standing magnetic field that alternates at specified frequency. An inductor placed near or in the magnetic field may induce an alternating current at the specified frequency. Each end of the inductor may be coupled to a connector that may be coupled to an antenna that may be incorporated into a plasma processing chamber.
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