Invention Grant
- Patent Title: Radio frequency signal splitter and matcher
- Patent Title (中): 射频信号分离器和匹配器
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Application No.: US13948882Application Date: 2013-07-23
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Publication No.: US09130536B2Publication Date: 2015-09-08
- Inventor: Barton Lane
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Main IPC: H01P5/12
- IPC: H01P5/12 ; H03H7/42

Abstract:
This application relates to systems and methods for splitting a current signal into at least two signals that are out of phase with each other. The power splitter may include a conductive element that may generate standing magnetic field that alternates at specified frequency. An inductor placed near or in the magnetic field may induce an alternating current at the specified frequency. Each end of the inductor may be coupled to a connector that may be coupled to an antenna that may be incorporated into a plasma processing chamber.
Public/Granted literature
- US20150028962A1 RADIO FREQUENCY SIGNAL SPLITTER AND MATCHER Public/Granted day:2015-01-29
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