Invention Grant
US09131219B2 Method and apparatus for triangulation-based 3D optical profilometry 有权
用于基于三角测量的3D光学轮廓测量法的方法和装置

Method and apparatus for triangulation-based 3D optical profilometry
Abstract:
A method for determining a centerline for a triangulation-based optical profilometry system, compensating for the spatial variations of the reflectance of an object's surface. The method comprises providing a luminous line on the object, the luminous line being a triangulation line superposed with a compensation line; capturing an image of the triangulation line and of the compensation line; for each position along the imaged triangulation line, determining a transverse triangulation profile from the imaged triangulation line and a transverse compensation profile from the imaged compensation line; determining a transverse correction profile given by the reciprocal of the transverse compensation profile; multiplying the transverse triangulation profile with the transverse correction profile to obtain a corrected transverse triangulation profile; computing a center of the corrected transverse triangulation profile. The centers determined at positions along the triangulation line form the centerline. Embodiments of a triangulation-based optical profilometry system integrating the method are disclosed.
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