Invention Grant
- Patent Title: Methods and systems for grain size evaluation of multi-cystalline solar wafers
- Patent Title (中): 多晶硅太阳能晶圆粒度评估方法与系统
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Application No.: US13329914Application Date: 2011-12-19
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Publication No.: US09136185B2Publication Date: 2015-09-15
- Inventor: Gang Shi , Thomas E. Doane , Steven L. Kimbel , Robert H. Fuerhoff
- Applicant: Gang Shi , Thomas E. Doane , Steven L. Kimbel , Robert H. Fuerhoff
- Applicant Address: SG Singapore
- Assignee: MEMC Singapore Pte., Ltd.
- Current Assignee: MEMC Singapore Pte., Ltd.
- Current Assignee Address: SG Singapore
- Agency: Armstrong Teasdale LLP
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06K9/40 ; G06K9/32 ; H01L21/66 ; G01N21/95 ; G01N21/88

Abstract:
Methods and systems for evaluation of wafers are disclosed. One example method includes illuminating a multi-crystalline wafer according to a plurality of lighting parameters, capturing a plurality of images of the multi-crystalline wafer, stacking and projecting the plurality of images to generate a composite image, analyzing the composite image to identify one or more grains of the multi-crystalline wafer, and generating a report based on the analysis of the composite image. The multi-crystalline wafer is illuminated according to a different one of the plurality of lighting parameters in at least two of the plurality of images.
Public/Granted literature
- US20130156293A1 Methods and Systems For Grain Size Evaluation Of Multi-Cystalline Solar Wafers Public/Granted day:2013-06-20
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