Invention Grant
US09136185B2 Methods and systems for grain size evaluation of multi-cystalline solar wafers 有权
多晶硅太阳能晶圆粒度评估方法与系统

Methods and systems for grain size evaluation of multi-cystalline solar wafers
Abstract:
Methods and systems for evaluation of wafers are disclosed. One example method includes illuminating a multi-crystalline wafer according to a plurality of lighting parameters, capturing a plurality of images of the multi-crystalline wafer, stacking and projecting the plurality of images to generate a composite image, analyzing the composite image to identify one or more grains of the multi-crystalline wafer, and generating a report based on the analysis of the composite image. The multi-crystalline wafer is illuminated according to a different one of the plurality of lighting parameters in at least two of the plurality of images.
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