Invention Grant
- Patent Title: Native devices having improved device characteristics and methods for fabrication
- Patent Title (中): 具有改进的器件特性和制造方法的本机器件
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Application No.: US13974103Application Date: 2013-08-23
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Publication No.: US09136382B2Publication Date: 2015-09-15
- Inventor: Shashank S. Ekbote , Rongtian Zhang
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agent Donald D. Min
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L29/78 ; H01L21/265 ; H01L29/10 ; H01L29/66

Abstract:
A method for fabricating a native device is presented. The method includes forming a gate structure over a substrate starting at an outer edge of an inner marker region, where the gate structure extends in a longitudinal direction, and performing MDD implants, where each implant is performed using a different orientation with respect to the gate structure, performing pocket implants, where each implant is performed using a different orientation with respect to the gate structure, and concentrations of the pocket implants vary based upon the orientations. A transistor fabricated as a native device, is presented, which includes an inner marker region, an active outer region which surrounds the inner marker region, a gate structure coupled to the inner marker region, and first and second source/drain implants located within the active outer region and interposed between the first source/drain implant and the second source/drain implant.
Public/Granted literature
- US20140035067A1 NATIVE DEVICES HAVING IMPROVED DEVICE CHARACTERISTICS AND METHODS FOR FABRICATION Public/Granted day:2014-02-06
Information query
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