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US09136793B2 Resonator element, resonator, electronic device, electronic apparatus, and method of manufacturing resonator element 有权
谐振器元件，谐振器，电子器件，电子设备和制造谐振元件的方法

Resonator element, resonator, electronic device, electronic apparatus, and method of manufacturing resonator element
Abstract:
A resonator element includes a substrate including a vibrating portion that performs thickness-shear vibration and an excitation electrode provided on top and bottom main surfaces of the vibrating portion. Assuming that the average plate thickness calculated from the plate thicknesses of a plurality of regions of the vibrating portion is H and the plate thickness difference, which is a difference between the maximum and minimum values of the plate thicknesses of the plurality of regions of the vibrating portion, is ΔH, 0%
Abstract(Chinese):

谐振器元件包括：基板，包括执行厚度剪切振动的振动部分和设置在振动部分的顶部和底部主表面上的激励电极。 假设由振动部的多个区域的板厚计算出的平均板厚为H，并且板厚差为板振动的多个区域的板厚的最大值和最小值之差 H，H = H％，H = H％，H = H，H;

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