Invention Grant
- Patent Title: Piezoelectric device
- Patent Title (中): 压电元件
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Application No.: US13563169Application Date: 2012-07-31
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Publication No.: US09136820B2Publication Date: 2015-09-15
- Inventor: Yasuhiro Aida , Katsuyuki Kurachi , Hitoshi Sakuma , Kazuhiko Maejima
- Applicant: Yasuhiro Aida , Katsuyuki Kurachi , Hitoshi Sakuma , Kazuhiko Maejima
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Main IPC: H01L41/187
- IPC: H01L41/187 ; C09K5/00 ; C04B35/00 ; H03H9/02 ; H01L41/053 ; H01L41/08 ; G01C19/5783 ; H01L41/113 ; G01P15/00 ; H04R17/02 ; H01L41/09
Abstract:
A piezoelectric device according to the present invention is provided with a pair of electrode films, a piezoelectric film sandwiched in between the pair of electrode films, and a stress control film which is in direct contact with a surface of at least one of the pair of electrode films, on the side where the electrode film is not in contact with the piezoelectric film, and which has a linear expansion coefficient larger than those of the relevant electrode film and the piezoelectric film.
Public/Granted literature
- US20140035440A1 PIEZOELECTRIC DEVICE Public/Granted day:2014-02-06
Information query
IPC分类:
