Invention Grant
- Patent Title: Closed-loop control for improved polishing pad profiles
- Patent Title (中): 改善抛光垫轮廓的闭环控制
-
Application No.: US13087180Application Date: 2011-04-14
-
Publication No.: US09138860B2Publication Date: 2015-09-22
- Inventor: Sivakumar Dhandapani , Jun Qian , Christopher D. Cocca , Jason G. Fung , Shou-Sung Chang , Charles C. Garretson , Gregory E. Menk , Stan D. Tsai
- Applicant: Sivakumar Dhandapani , Jun Qian , Christopher D. Cocca , Jason G. Fung , Shou-Sung Chang , Charles C. Garretson , Gregory E. Menk , Stan D. Tsai
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: B24B53/02
- IPC: B24B53/02 ; B24B53/017 ; B24B37/04

Abstract:
Embodiments described herein use closed-loop control (CLC) of conditioning sweep to enable uniform groove depth removal across the pad, throughout pad life. A sensor integrated into the conditioning arm enables the pad stack thickness to be monitored in-situ and in real time. Feedback from the thickness sensor is used to modify pad conditioner dwell times across the pad surface, correcting for drifts in the pad profile that may arise as the pad and disk age. Pad profile CLC enables uniform reduction in groove depth with continued conditioning, providing longer consumables lifetimes and reduced operating costs.
Public/Granted literature
- US20110256812A1 CLOSED-LOOP CONTROL FOR IMPROVED POLISHING PAD PROFILES Public/Granted day:2011-10-20
Information query