Invention Grant
US09138998B2 Liquid drop ejecting head, image forming device, and method of manufacturing liquid drop ejecting head 有权
液滴喷射头,图像形成装置以及液滴喷射头的制造方法

Liquid drop ejecting head, image forming device, and method of manufacturing liquid drop ejecting head
Abstract:
A liquid drop ejecting head includes a a nozzle plate to form nozzles, a liquid chamber substrate including one surface bonded to the nozzle plate and forming liquid chambers provided for the nozzles and communicating with the nozzles, a diaphragm bonded to the other surface of the liquid chamber substrate to form a part of each liquid chamber, and a pressure generating unit giving pressure oscillation to the diaphragm in accordance with a liquid drop eject signal to exert pressure on a liquid in each liquid chamber through the diaphragm. In the liquid drop ejecting head, a protection film is formed on an inner side wall of each liquid chamber by a chemical reaction of fluorocarbon and silicon fluoride oxide of a by-product formed on the inner side wall of the liquid chamber with the formation of the liquid chambers in the liquid chamber substrate.
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