Invention Grant
- Patent Title: Microfabrication of high quality three dimensional structures using wafer-level glassblowing of fused quartz and ultra low expansion glasses
- Patent Title (中): 使用熔融石英和超低膨胀玻璃的晶片级玻璃吹制高品质三维结构的微加工
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Application No.: US13838132Application Date: 2013-03-15
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Publication No.: US09139417B2Publication Date: 2015-09-22
- Inventor: Alexander A. Trusov , Doruk Senkal , Andrei M. Shkel
- Applicant: The Regents of the University of California
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agent Marcus C. Dawes; Daniel L. Dawes
- Main IPC: G01P15/00
- IPC: G01P15/00 ; B81B3/00 ; B81C1/00 ; G01C19/5691

Abstract:
A high temperature micro-glassblowing process and a novel inverted-wineglass architecture that provides self-aligned stem structures. The fabrication process involves the etching of a fused quartz substrate wafer. A TSG or fused quartz device layer is then bonded onto the fused quartz substrate, creating a trapped air pocket or cavity between the substrate and the TSG device layer. The substrate and TSG device layer 14 are then heated at an extremely high temperature of approximately 1700° C., forming an inverted wineglass structure. Finally, the glassblown structure is cut or etched from the substrate to create a three dimensional wineglass resonator micro-device. The inverted wineglass structure may be used as a high performance resonator for use as a key element in precision clock resonators, dynamic MEMS sensors, and MEMS inertial sensors.
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