Invention Grant
US09139932B2 Quartz glass crucible and method for treating surface of quartz glass crucible 有权
石英玻璃坩埚及石英玻璃坩埚表面处理方法

Quartz glass crucible and method for treating surface of quartz glass crucible
Abstract:
There is provided a quartz glass article having a surface treated with novel coating materials which provides a reduced chemistry, wherein the quartz glass surface having a reduced chemistry upon exposure to melted silicon or similarly corrosive environments, forms crystalline structures covering at least 30% of the coated surface of the quartz glass crucible. Said crystalline covered surface provides a more stable surface of contact with the silicon melt and the growth of single crystal silicon. In one embodiment of the invention, the coating material comprises at least a methyl group for providing at least one of a hydrogenated and a methylated surface on the coated surface, forming rosette structures, or other crystalline morphologies covering at last 80% of the coated surface. In another embodiment of the invention, the coating material is selected from at least one of an amine, an organosilane halogen and mixtures thereof.
Information query
Patent Agency Ranking
0/0