Invention Grant
- Patent Title: Vacuum pumping system
- Patent Title (中): 真空泵系统
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Application No.: US13583429Application Date: 2011-02-25
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Publication No.: US09140250B2Publication Date: 2015-09-22
- Inventor: Ian David Stones , Ian Olsen , Richard Glyn Horler
- Applicant: Ian David Stones , Ian Olsen , Richard Glyn Horler
- Applicant Address: GB Crawley, West Sussex
- Assignee: EDWARDS LIMITED
- Current Assignee: EDWARDS LIMITED
- Current Assignee Address: GB Crawley, West Sussex
- Agent Shaoni L. Mitchell
- Priority: GB1005459.1 20100331
- International Application: PCT/GB2011/050373 WO 20110225
- International Announcement: WO2011/121322 WO 20111006
- Main IPC: F04B37/14
- IPC: F04B37/14 ; F04B23/04 ; F04B37/02 ; F04B37/06 ; F04B41/06 ; F04C25/02 ; F04C28/02 ; F04C28/06 ; F04D19/04
Abstract:
The present invention relates to a vacuum pumping system (18) for evacuating gas from a plurality of chambers (12, 14, 16) at different pressures. The pumping system comprises a plurality of compound vacuum pumps (20, 22), wherein each compound pump comprises a plurality of pumping mechanisms (24,26,28) connected in series between a pump inlet (30) and a pump exhaust (32) and an interstage port (34, 36) between pumping mechanisms in the series. The system is configured such that gas evacuated from one of said chambers is pumped through the interstage ports of at least two of said compound pumps.
Public/Granted literature
- US20130028757A1 VACUUM PUMPING SYSTEM Public/Granted day:2013-01-31
Information query
