Invention Grant
US09140644B2 Method and apparatus for detecting a gas concentration with reduced pressure dependency
有权
用于以降低的压力依赖性检测气体浓度的方法和装置
- Patent Title: Method and apparatus for detecting a gas concentration with reduced pressure dependency
- Patent Title (中): 用于以降低的压力依赖性检测气体浓度的方法和装置
-
Application No.: US13462026Application Date: 2012-05-02
-
Publication No.: US09140644B2Publication Date: 2015-09-22
- Inventor: Andreas Wittmann , Stefan Manzeneder , Rui Protasio , Michel Studer , Thomas Hessler
- Applicant: Andreas Wittmann , Stefan Manzeneder , Rui Protasio , Michel Studer , Thomas Hessler
- Applicant Address: CH Kagiswil
- Assignee: Axetris AG
- Current Assignee: Axetris AG
- Current Assignee Address: CH Kagiswil
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: EP11401506 20110503
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G01N21/61 ; G01N21/39

Abstract:
This invention relates to a method that makes the measurement of a trace gas concentration invariant or at least less affected to pressure variations in the gas and atmospheric pressure changes. This method neither requires a pressure sensor nor a pressure calibration routine. Furthermore, the method can be applied to other gas species present in the background gas or to the background gas itself that cross-interfere with the target gas of interest. This allows removing any pressure dependency of cross-interference parameters of other gas species and/or the background gas. The new method for accurately measuring a gas concentration is based on optimizing the wavelength modulation amplitude of the laser to minimum pressure dependency.
Public/Granted literature
- US20120283961A1 METHOD AND APPARATUS FOR DETECTING A GAS CONCENTRATION WITH REDUCED PRESSURE DEPENDENCY Public/Granted day:2012-11-08
Information query