Invention Grant
- Patent Title: Liquid precursor for deposition of indium selenide and method of preparing the same
- Patent Title (中): 用于沉积硒化铟的液体前体及其制备方法
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Application No.: US13136982Application Date: 2011-08-16
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Publication No.: US09142408B2Publication Date: 2015-09-22
- Inventor: Calvin J. Curtis , Alexander Miedaner , Marinus Franciscus Antonius Maria van Hest , David S. Ginley , Peter A. Hersh , Louay Eldada , Billy J. Stanbery
- Applicant: Calvin J. Curtis , Alexander Miedaner , Marinus Franciscus Antonius Maria van Hest , David S. Ginley , Peter A. Hersh , Louay Eldada , Billy J. Stanbery
- Applicant Address: US CO Golden
- Assignee: Alliance for Sustainable Energy, LLC
- Current Assignee: Alliance for Sustainable Energy, LLC
- Current Assignee Address: US CO Golden
- Agent John C. Stolpa; Michael A. McIntyre; Suzanne C. Walts
- Main IPC: H01L21/02
- IPC: H01L21/02 ; C23C18/12 ; H01L31/032 ; H01L31/20
Abstract:
Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.
Public/Granted literature
- US20120094431A1 Liquid precursor for deposition of indium selenide and method of preparing the same Public/Granted day:2012-04-19
Information query
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