Invention Grant
- Patent Title: Method for manufacturing light-emitting display device
- Patent Title (中): 发光显示装置的制造方法
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Application No.: US13226845Application Date: 2011-09-07
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Publication No.: US09142568B2Publication Date: 2015-09-22
- Inventor: Shunpei Yamazaki , Jun Koyama , Kaoru Hatano
- Applicant: Shunpei Yamazaki , Jun Koyama , Kaoru Hatano
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2010-202823 20100910
- Main IPC: H01L33/08
- IPC: H01L33/08 ; H01L21/336 ; H01L33/16 ; H01L27/12 ; H01L29/417

Abstract:
It is an object of one embodiment of the present invention to manufacture a light-emitting display device by simplifying a manufacturing process of a transistor, without an increase in the number of steps as well as the number of photomasks as compared to those in the conventional case. A step for processing a semiconductor layer into an island shape is omitted by using a high-resistance oxide semiconductor which is intrinsic or substantially intrinsic for the semiconductor layer, used to form transistors. Formation of an opening in the semiconductor layer or an insulating layer formed over the semiconductor layer and etching of an unnecessary portion of the semiconductor layer are performed at the same time; thus, the number of photolithography steps is reduced.
Public/Granted literature
- US20120061673A1 METHOD FOR MANUFACTURING LIGHT-EMITTING DISPLAY DEVICE Public/Granted day:2012-03-15
Information query
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