Invention Grant
- Patent Title: Pad design for backside illuminated image sensor
- Patent Title (中): 背面照明图像传感器的垫设计
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Application No.: US12708167Application Date: 2010-02-18
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Publication No.: US09142586B2Publication Date: 2015-09-22
- Inventor: Wen-De Wang , Dun-Nian Yaung , Jen-Cheng Liu , Chun-Chieh Chuang , Jeng-Shyan Lin
- Applicant: Wen-De Wang , Dun-Nian Yaung , Jen-Cheng Liu , Chun-Chieh Chuang , Jeng-Shyan Lin
- Applicant Address: TW
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW
- Agency: Lowe Hauptman & Ham, LLP
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L27/146

Abstract:
A semiconductor image sensor device includes first and second semiconductor substrates. A pixel array and a control circuit are formed in a first surface of the first substrate. An interconnect layer is formed over the first surface of the first substrate and electrically connects the control circuit to the pixel array. A top conducting layer is formed over the interconnect layer to have electrical connectivity with at least one of the control circuit or the pixel array via the interconnect layer. A surface of a second substrate is bonded to the top conducting layer. A conductive through-silicon-via (TSV) passes through the second substrate, and has electrical connectivity with the top conducting layer. A terminal is formed on an opposite surface of the second substrate, and electrically connected to the TSV.
Public/Granted literature
- US20100213560A1 PAD DESIGN FOR BACKSIDE ILLUMINATED IMAGE SENSOR Public/Granted day:2010-08-26
Information query
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