Invention Grant
- Patent Title: Electromechanical transducer device and method of making the same
- Patent Title (中): 机电换能器及其制造方法
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Application No.: US12839701Application Date: 2010-07-20
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Publication No.: US09143877B2Publication Date: 2015-09-22
- Inventor: Toshiyuki Ogawa , Makoto Takagi , Kazuhiko Kato
- Applicant: Toshiyuki Ogawa , Makoto Takagi , Kazuhiko Kato
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon USA, Inc. IP Division
- Priority: JP2009-172723 20090724; JP2010-096557 20100420
- Main IPC: H02N1/08
- IPC: H02N1/08 ; H04R31/00 ; B06B1/02

Abstract:
Provided is an electromechanical transducer device including a substrate that is conductive, and a plurality of electromechanical transducer elements disposed on a first surface of the substrate. A groove that electrically isolates the plurality of electromechanical transducer elements from each other is formed in the substrate, the groove extending from a second surface side of the substrate toward the first surface side of the substrate, the second surface being opposite the first surface. The width of the groove on the first surface side of the substrate is smaller than the width of the groove on the second surface side of the substrate.
Public/Granted literature
- US20110018387A1 ELECTROMECHANICAL TRANSDUCER DEVICE AND METHOD OF MAKING THE SAME Public/Granted day:2011-01-27
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