Invention Grant
- Patent Title: Welded bellows for semiconductor manufacturing device
- Patent Title (中): 焊接波纹管用于半导体制造装置
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Application No.: US14110651Application Date: 2012-03-09
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Publication No.: US09147571B2Publication Date: 2015-09-29
- Inventor: Hidekazu Takahashi , Masahiko Inoue , Hiroyuki Ochiai
- Applicant: Hidekazu Takahashi , Masahiko Inoue , Hiroyuki Ochiai
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: EAGLE INDUSTRY CO., LTD.,EAGLEBURGMANN JAPAN CO., LTD.
- Current Assignee: EAGLE INDUSTRY CO., LTD.,EAGLEBURGMANN JAPAN CO., LTD.
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Law Office of Katsuhiro Arai
- Priority: JP2011-097758 20110426
- International Application: PCT/JP2012/056062 WO 20120309
- International Announcement: WO2012/147417 WO 20121101
- Main IPC: F16J15/00
- IPC: F16J15/00 ; H01L21/00 ; F16J3/04

Abstract:
An accordion-structured welded bellows for a semiconductor-manufacturing device is characterized in that a plurality of annular bellows plates having curved surfaces in a radial direction are connected in an alternating fashion on the outside-diameter side and the inside-diameter side, wherein the annular bellows plates have a processing-side bellows plate and a non-processing-side bellows plate, a gas layer is interposed between the two bellows plates, the processing-side bellows plate is configured as a thick plate, and the non-processing-side bellows plate is configured as a thin plate. The welded bellows is less likely to be damaged by foreign matter and to be able to use the non-processing-side bellows plate to compensate for any damage to the processing-side bellows plate.
Public/Granted literature
- US20140082906A1 WELDED BELLOWS FOR SEMICONDUCTOR MANUFACTURING DEVICE Public/Granted day:2014-03-27
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