Invention Grant
US09147589B2 Systems and methods for at least partially converting films to silicon oxide and/or improving film quality using ultraviolet curing in steam and densification of films using UV curing in ammonia
有权
在蒸汽中使用紫外线固化和使用UV固化在氨中使薄膜致密化至少部分地将膜转化为氧化硅和/或提高膜质量的系统和方法
- Patent Title: Systems and methods for at least partially converting films to silicon oxide and/or improving film quality using ultraviolet curing in steam and densification of films using UV curing in ammonia
- Patent Title (中): 在蒸汽中使用紫外线固化和使用UV固化在氨中使薄膜致密化至少部分地将膜转化为氧化硅和/或提高膜质量的系统和方法
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Application No.: US13955763Application Date: 2013-07-31
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Publication No.: US09147589B2Publication Date: 2015-09-29
- Inventor: Bhadri N Varadarajan , Bart Van Schravendijk
- Applicant: Novellus Systems, Inc.
- Applicant Address: US CA San Jose
- Assignee: NOVELLUS SYSTEMS, INC.
- Current Assignee: NOVELLUS SYSTEMS, INC.
- Current Assignee Address: US CA San Jose
- Main IPC: F26B3/34
- IPC: F26B3/34 ; H01L21/67 ; H01L21/02
Abstract:
A processing system includes a chamber and a steam source that supplies steam in the chamber. A UV source directs UV light onto a deposited layer of a substrate in the presence of the steam from the steam source for a predetermined conversion period to at least partially convert the deposited layer.
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