Invention Grant
US09147697B2 Manufacturing method of array substrate, array substrate, and display apparatus
有权
阵列基板,阵列基板和显示装置的制造方法
- Patent Title: Manufacturing method of array substrate, array substrate, and display apparatus
- Patent Title (中): 阵列基板,阵列基板和显示装置的制造方法
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Application No.: US13806182Application Date: 2012-11-09
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Publication No.: US09147697B2Publication Date: 2015-09-29
- Inventor: Yunbok Lee
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing CN Hefei, Anhui
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing CN Hefei, Anhui
- Agency: Ladas & Parry LLP
- Priority: CN201110379466 20111124
- International Application: PCT/CN2012/084404 WO 20121109
- International Announcement: WO2013/075591 WO 20130530
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/12 ; G02F1/1362

Abstract:
The present disclosure relates to an array substrate and the manufacturing method thereof, and a display apparatus. The manufacturing method of the array substrate comprises following step. A gate insulating layer and an active layer is formed on the substrate with said gate electrode and said common electrode formed thereon. A source drain layer is formed on the substrate with said gate insulating layer and said active layer formed thereon. A passivation layer is formed on the substrate with said source drain layer formed thereon, and a through hole is formed in the passivation layer; a pixel electrode is formed on the substrate with said passivation layer formed thereon with said through hole. The pixel electrode is connected to the drain electrode in the source drain layer through said through hole. The process for forming the pixel electrode comprises first etching, ashing and second etching.
Public/Granted literature
- US20140054626A1 ARRAY SUBSTRATE, MANUFACTURING METHOD THEREOF AND DISPLAY APPARATUS Public/Granted day:2014-02-27
Information query
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