Invention Grant
US09150447B2 Silica crucible for pulling silicon single crystal and method of producing the same 有权
用于拉硅单晶的二氧化硅坩埚及其制造方法

Silica crucible for pulling silicon single crystal and method of producing the same
Abstract:
There is provided a silica crucible for pulling a silicon single crystal, comprising silica glass and having a two-layer structure of an outer layer and an inner layer, wherein the inner layer, in a sectional side view of the crucible, has a wavy inner surface shape having mountain parts and valley parts at least between a start position and an end position for the pulling of a silicon single crystal in a silicon melt surface, and when a distance from an upper opening end of the crucible to the start position for the pulling of the silicon single crystal is 100, only a crucible portion from the upper opening end to a position within a range of 40 to 100 is crystalline.
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