Invention Grant
- Patent Title: Replacement metal gate FinFET
- Patent Title (中): 替代金属栅FinFET
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Application No.: US13672899Application Date: 2012-11-09
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Publication No.: US09153447B2Publication Date: 2015-10-06
- Inventor: Hemanth Jagannathan , Sanjay C. Mehta , Junli Wang , Chun-Chen Yeh , Stefan Schmitz
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/28 ; H01L29/78 ; H01L29/66

Abstract:
A field effect transistor device includes a fin including a semiconductor material arranged on an insulator layer, the fin including a channel region, a hardmask layer arranged partially over the channel region of the fin, a gate stack arranged over the hardmask layer and over the channel region of the fin, a metallic alloy layer arranged on a first portion of the hardmask layer, the metallic alloy layer arranged adjacent to the gate stack, and a first spacer arranged adjacent to the gate stack and over the metallic alloy layer.
Public/Granted literature
- US20140110785A1 REPLACEMENT METAL GATE FINFET Public/Granted day:2014-04-24
Information query
IPC分类: